Page 193 - Erciyes University Prospectus
P. 193
Erciyes University PROSPECTUS
200 m2 area of class 1000 and class 10000 clean rooms. These
clean rooms include several operational tools such as, mask
aligner, metal evaporator, and inductively coupled plasma
chemical vapor deposition system.
The characterization laboratories include atomic force mi-
croscopy (AFM), scanning electron microscopy (SEM), Raman
spectroscopy, zeta sizer, UV-Vis Spectrometer, quartz crystal
microbalance, goniometer, ellipsometer and other characteri-
zation and processing tools.
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